PLATINUM RESISTOR TYPE TEMPERATURE SENSOR AND MANUFACTURING METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a platinum resistor type temperature sensor along with its manufacturing method capable of shielding the platinum resistor from external atmosphere.;SOLUTION: The temperature sensor comprises a sensor base 100 and a sensor element 200. A housing part 115 is formed on a support base 110 from its front surface side to constitute the sensor base 100. A platinum resistor 230 is formed on the surface of an element base 210 to constitute the sensor element 200. In the sensor element 200, the element base 210 is hermetically fitted and housed in a housing part 115 of the support base 110 from the platinum resistor 230 side.;COPYRIGHT: (C)2005,JPO&NCIPI