METHOD TO ACTIVATE SILICON SURFACE, MOLECULE PATTERN GENERATED BY THE SAME, AND USE OF MOLECULE PATTERN

摘要

PROBLEM TO BE SOLVED: To provide a method for printing and patterning a molecule on a silicon surface at a high speed by using a microcontact printing technique.;SOLUTION: The surface of a silicon substrate having an oxide film is HF-treated to make it a hydrogen end surface, and after the silicon surface has been activated through cyanuric chloride treatment, a stamp with ink including a nucleophilic group is pressed against this surface to transfer the pattern. After being cleaned by using the solvent used for ink, the surface is exposed to the molecule containing the nucleophilic group, such that the remaining activated silicon surface is passivated.;COPYRIGHT: (C)2005,JPO&NCIPI