RF-MEMS SWITCH DEVICE AND ANTENNA DEVICE WITH RF-MEMS SWITCH APPARATUS MOUNTED THEREON

摘要

PROBLEM TO BE SOLVED: To obtain an RF-MEMS switch device and antenna device with the same loaded thereon in which an influence exerted by a bias line upon an electromagnetic field inside an RF circuit can be reduced.;SOLUTION: An RF circuit including a plurality of conductor cells 2 serially provided on the upper surface of a silicon substrate 1, a ground conductor 3 provided on the lower surface of the silicon substrate 1 and a power feeding line 6 connected between a conductor cell 2a and the ground conductor 3 comprises an RF-MEMS switch 11 provided between conductor cells 2a and 2b and an RF-MEMS switch 13 provided between conductor cells 2b and 2c. The RF-MEMS switch 11 includes a driving metallic plate 11a, a lower metallic plate 11b, a bias line 11c, a bias line 11d, and a DC variable power source, and the RF-MEMS switch 13 includes a driving metallic plate 13a, a lower metallic plate 13b, a bias line 13d, and a DC variable power source.;COPYRIGHT: (C)2005,JPO&NCIPI