REDUCTION REFINING METHOD OF HIGH PURITY METAL FROM VAPORIZABLE METALLIC COMPOUND BY MAGNETRON CAPACITIVE COUPLING TYPE PLASMA, AND DEVICE THEREFOR

摘要

PROBLEM TO BE SOLVED: To obtain reduced metal of high purity such as Ti by efficient and low energy consumption while retaining the high purity of high purity, inexpensive vaporizable metallic compounds as starting materials.;SOLUTION: A reaction region within a chamber is fed with vaporizable metallic compounds 8 such as TiCl₄ in a vaporized state together with hydrogen. In the reaction region, magnetron capacitive coupling type plasma 11 is formed between external electrodes composed of an inner tube 1 and an outer tube 2 and internal electrodes 3 stored with magnets 4, and hydrogen reduction is performed. The reduced metal and hydrides (9) are separately recovered. The reduced metal is precipitated mainly over the electrodes and the wall faces of the chamber, is peeled, is naturally fallen, and is deposited on the lower part of the chamber so as to be collected. The method is widely applicable to metal such as Si, Ge, Al, Sn and V which is the active one firmly bonded with oxygen and from which high purity metal is hard to be obtained by thermal reduction, and is the one having high purity and from which vaporizable halides or hydrogen compounds can be obtained.;COPYRIGHT: (C)2005,JPO&NCIPI