CALCULATION METHOD OF REACTION MECHANISM AND RECORDING MEDIUM WITH THE CALCULATION METHOD RECORDED THEREON

摘要

PPROBLEM TO BE SOLVED: To provide a calculation method of a reaction mechanism capable of easily calculating a reaction process and to provide a process simulation method using thereof. PSOLUTION: In the calculation method of the reaction mechanism, the reaction process of chemical species is estimated by making atoms consisting of one or more chemical species dynamically move respectively and by dynamically calculating, many times or until an intended chemical species is obtained, to determine their state after a fixed time. In the process simulation, an optical design of the process is carried out using the above calculation method. PCOPYRIGHT: (C)2005,JPO&NCIPI