MICRO-FLUX GATE SENSOR MANUFACTURED USING AMORPHOUS MAGNETISM CORE, AND MANUFACTURING METHOD THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a micro-flux gate sensor manufactured considering the amorphous magnetic substance as a core and a sensor, using micromachining technology.;SOLUTION: The manufacturing method of a micro flux gate sensor comprises a step for manufacturing an excitation coil and a lower coil on a wafer for magnetic field detection, a step for manufacturing two amorphous magnetism core bar shape, after depositing the first insulating layer on the lower coil, a step for manufacturing the excitation coil and the lower coil for magnetic field detection producing an upper coil connected with the lower coil, after depositing a second insulating layer on the amorphous magnetism core, and a step for applying protective coat and exposing a pad on the portion of the upper part of the coils.;COPYRIGHT: (C)2005,JPO&NCIPI