ORGANIC/INORGANIC OXIDE MIXTURE THIN FILM, ELECTRONIC SUBSTRATE WITH BUILT-IN PASSIVE ELEMENT USING THE SAME, AND METHOD FOR MANUFACTURING ORGANIC/INORGANIC OXIDE MIXTURE THIN FILM

摘要

PPROBLEM TO BE SOLVED: To obtain organic/inorganic oxide mixture whose electrostatic capacity density is high in order to obtain capacitor material to be included in a substrate. PSOLUTION: A mixture thin film wherein inorganic oxide particles whose mean particle diameter is at most 90 nm are distributed in organic polymer, permittivity is at least 10 and thickness is at most 900 nm, the substrate which includes the thin film, and a method for manufacturing the thin film are provided. As a result, a complex thin film of inorganic oxide/organic polymer is obtained which is very thin and has very high electrostatic capacity density and superior property. PCOPYRIGHT: (C)2005,JPO&NCIPI