MICROWAVE PLASMA-GENERATION METHOD, MICROWAVE PLASMA-GENERATION DEVICE, AND METHOD FOR MANUFACTURING DIAMOND THIN FILM BY USING THE APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a microwave plasma-generation method capable of generating the plasma of high density in a wider region, by arranging several launchers in the same vacuum vessel and generating a plasma ball originating from a single plasma ball, and to provide an apparatus therefor.;SOLUTION: The microwave plasma-generation method comprises arranging a pair of launchers in the vacuum vessel 1 so as to face each other, introducing a gas for plasma generation between the facing launchers, and supplying a microwave power to each launcher to generate a plasma ball 15. The method includes the steps of supplying a microwave power from the launcher having an upside electrode plate 3u to generate a plasma ball, and gradually increasing the microwave power supplied from upper and lower launchers to enlarge the shape and increase the density of the plasma ball.;COPYRIGHT: (C)2005,JPO&NCIPI