Chemically etched to light a defined micro electrical contacts

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a probe whose uniformity is improved while the production cost of the probe is being reduced.;SOLUTION: The method of working a plurality of microprobes (81) comprises a step in which shapes (72) of the plurality of microprobes (81) are used as masks (73) so as to be demarcated; a step in which the surface of a metal foil (1201) is coated with a photoresist (1001); a step in which the masks (73) are placed on the metal foil (1201); a step in which the photoresist (1001) is exposed to light passed through the masks (73); a step in which the photoresist (1001) is developed; a step in which a part of the photoresist (1001) is removed and, in which a part of the metal foil (1201) is exposed; a step in which the surface of the metal foil (1201) is coated with an etchant, in which the exposed part is removed, and in which the plurality of microprobes (81) are created; and a step in which the plurality of microprobes (81) are chemically polished and plated.;COPYRIGHT: (C)2003,JPO