STAGE DEVICE, ALIGNER USING THE SAME, AND DEVICE MANUFACTURING METHOD USING ALIGNER

摘要

PROBLEM TO BE SOLVED: To avoid the formation of a mask chuck by providing an attraction means for making the mask chuck demountable in order to facilitate the maintenance of the mask chuck.;SOLUTION: The attraction means composed of a coil iron core 7 and a ferromagnetic substance 5 is provided while being separated to a mask chuck 1 side and a mask stage 2 side, and the coil iron core 7 provided on the mask stage 2 side is mounted via a leaf spring 6 having lower rigidity than that of the mask chuck 1.;COPYRIGHT: (C)2005,JPO&NCIPI