LIQUID DISCHARGING DEVICE AND LIQUID SUPPLYING AND DISCHARGING DEVICE FOR IMMERSION OBJECTIVE LENS

摘要

PROBLEM TO BE SOLVED: To provide a liquid supplying and discharging device for an immersion objective lens which do not exert adverse influence on aiming accuracy, whose reliability is high and whose maintainability is good.;SOLUTION: The liquid discharging device for the immersion objective lens is equipped with 1st liquid receiving parts (3 and 3a) attached to the immersion objective lens (2) and receiving liquid overflowing from the edge of the immersion objective lens and dropping it downward by gravity, a 2nd liquid receiving part (4) receiving the liquid dropped from the 1st liquid receiving parts by gravity, and a discharged liquid storage means (8) located under the 2nd liquid receiving part and storing the liquid discharged from the 2nd liquid receiving part.;COPYRIGHT: (C)2005,JPO&NCIPI