APPARATUS FOR SUPPLYING LIQUID FOR LIQUID IMMERSION, OBJECTIVE LENS, AND METHOD FOR SUPPLYING LIQUID FOR LIQUID IMMERSION

摘要

This invention provides an apparatus for supplying a liquid for liquid immersion, which can always properly keep the amount of a liquid for liquid immersion between an observation object and a front end lens without interrupting observation. An apparatus (5) for supplying a liquid for liquid immersion comprises a body part (7) mounted on the outer surface on a front end lens (1) in an objective lens (3), a liquid feed tube (9), a drain tube (11), liquid supply means (13), liquid discharge means (15) and the like. A liquid holding concave part (25) surrounding the front end lens (1) is formed by mounting the body part (7). The upper surface of water (27) as a liquid for liquid immersion held in the liquid holding concave part (25) comes into contact with the bottom face of a culture vessel (21). When the position of the culture vessel (21) is moved by moving a stage (19), the amount of water (27) is reduced. Water is properly replenished in the liquid holding concave part (25) by driving a micrometering pump (31), and excess water flows out and is stored in a liquid reservoir concave part (17).