HIGH-PRECISION GAS BEARING AXIALLY DIVIDED STAGE FOR CONVEYANCE AND RESTRAINT OF LARGE-SIZED FLAT-PLATE FLEXIBLE MEDIUM IN PROCESSING

摘要

PPROBLEM TO BE SOLVED: To provide an inspection system stage capable of increasing the size of a supported medium plate and decreasing the sizes of a granite base plate and a gantry as to a test or repair platform. PSOLUTION: A divided stage constituted as a module is used to inspect and/or repair a large-sized flat-plate glass medium. A low-precision air table part is detachably fitted on both the sides of a high-precision granite inspection/repair part positioned in the center. The glass medium held by a vacuum contact is conveyed on an air cushion from an upper web air table to a center inspection/repair part. A vacuum nozzle united with a porous medium pad precisely controls the height of the flexible medium above the center part during inspection or repair. In operation mode by a pipeline, the 1st medium can be loaded/unloaded while the 2nd medium is inspected or repaired. PCOPYRIGHT: (C)2005,JPO&NCIPI