HIGH-ACCURACY GAS BEARING SEPARATING AXIS STAGE FOR CONVEYING AND RESTRAINING LARGE FLAT FLEXIBLE MEDIUM DURING PROCESSING

摘要

PURPOSE: A high-accuracy gas bearing separating axis stage for conveying and restraining a large flat flexible medium during processing is provided to reduce the cost required for handling and conveying the stage and easily test ad repair a TFT-LCD(Thin Film Transistor-Liquid Crystal Display). CONSTITUTION: A system(10) includes three barriers or sections(410,412,414). The intermediate web barrier having the smallest size among the three barriers is designed to satisfy the highest mechanical accuracy. The up web stage barrier and the down web stage barrier convey a flat medium(432) from/to the intermediate web barrier. Only the intermediate web barrier is combined with the surface of a single granite base(422) and attached to a gantry(416) to reduce the size and weight of a granite block. The intermediate web barrier supports and aligns imaging modules(418,420) and accurately controls the z-axis of the medium while testing/repairing the surface of the granite base.