The monitor and the control which use the medium infrared spectroscopy for hydrogen peroxide steam processing technology

摘要

The evaporator (14), hydrogen peroxide and vapor are supplied, the disinfection of high level or sterilization territory (20). The medium infrared light detector (32), while crossing the territory of the processing chamber, in the spectrum, and the hydrogen peroxide steam and in the vapor whose 2nd it is absorbed by the spectrum and the vapor whose 1st 8,000nm which is absorbed it detects at the 3rd spectrum which the light in the infrared range, by the hydrogen peroxide steam is centered is narrow is narrow with in each case is not absorbed. From these measurements, absorbency or transmissivity is decided, and (40), from this decision, hydrogen peroxide and density of vapor are decided (42). The temperature which it monitors (44) and the density which is decided is converted saturation percent (54). The hydrogen peroxide to the chamber and supply of vapor are controlled following to the saturation percent which is decided (60).