Flat two-dimensional magnetic component and amorphous magnetic thin film

摘要

PURPOSE: To provide a soft magnetic thin film of a flat magnetic element permitting miniaturization and higher performance, by realizing coexistence of both highly saturated magnetization and high resistivity and facilitating the acquisition of high frequency magnetic permeability by excitation of hard axis. ;CONSTITUTION: This is a flat magnetic element having an amorphous magnetic thin film and a flat coil. The amorphous magnetic thin film possess, as at least part of a thin film forming region, a microstructure constituted by a first amorphous phase 1 bearing the magnetism including at least one of the iron and cobalt and a second amorphous phase 2 arranged in the vicinities of the first amorphous phase 1 and containing boron and 4B group element and has uniaxial magnetic anisotrophy in plane. The amorphous magnetic thin film has a composition that can be expressed essentially by a chemical formula such as (Fe_1-xCo_x)_1-x(B_1-zX_z)_y (in the formula, X has at least one kind of element selected from 4B group elements 0-x≤0.5, 0.06y0.5 (specially 0.10y0.33) and 0.05 z0.5).;COPYRIGHT: (C)1995,JPO