MANUFACTURING METHOD OF COLD CATHODE TYPE ELECTRON EMISSION ELEMENT, COLD CATHODE TYPE ELECTRON EMISSION ELEMENT, AND DRIVING METHOD OF COLD CATHODE TYPE ELECTRON EMISSION ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a cold cathode type electron emission element capable of increasing an emission current by improving emission efficiency.;SOLUTION: This manufacturing method of this cold cathode type electron emission element comprises processes for: forming a pair of electrodes on a substrate with a space; forming, in the space between a pair of the electrode, conductive thin films having a crack part and respectively connected to a pair of the electrodes; forming electron emission parts each formed of a conductive deposition on the conductive thin films; and applying a treatment using plasma to the electron emission parts to expand the gap of the crack part.;COPYRIGHT: (C)2005,JPO&NCIPI