Conductivity above 99 volume below to contain 84

摘要

PROBLEM TO BE SOLVED: To provide a low thermal expansion material having high specific rigidity and sufficient conductivity in order to realize a precision mechanical member being lightweight and having high dimensional accuracy under an environment requiring high cleanliness.;SOLUTION: The conducive, low expansion ceramic sintered compact contains a β-eucryptite phase 1 in an amount of ≥84 and ≤99 vol. %, and has an absolute value of thermal expansion coefficient in the temperature range of 0 to 50°C of ≤1.0×10-7/K, a volume specific resistivity of ≤1.0×107 Ω.cm and a specific rigidity of ≥40 GPa/g/cm3. The remainder other than the β-eucryptite phase 1 is composed of carbon or a compound 2 (carbon compound) containing carbon and TiN particles 3. The texture structure of the sintered compact is such that the TiN particles 3 are dispersed in the texture without being continuously connected even at a partial area, and the carbon compound 2 is contained, as a grain boundary phase, at least at part of the grain boundary between the β-eucryptite phase 1 and the TiN particle 3.;COPYRIGHT: (C)2001,JPO