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Protection methods SPINDT type cathode of an electron emission device during manufacture

机译:在制造过程中电子发射装置的SPINDT型阴极的保护方法

摘要

In a partially finished electron-emitting device having electron-emissive elements (56A) formed at least partially with electrically non-insulating emitter material, electron-emissive element contamination that could result from passage of contaminant material through an excess layer (56B) of the emitter material is inhibited by forming a protective layer (58 or 70) over the excess emitter-material layer before performing additional processing operations on the electron-emitting device. Subsequent to these processing operations, material of the excess and protective layers overlying the electron-emissive elements is removed to expose the electron-emissive elements.
机译:在具有至少部分地由非电绝缘发射极材料形成的电子发射元件(56A)的部分完成的电子发射器件中,电子发射元件的污染可能是由于污染材料穿过该发射极的过量层(56B)而导致的。在电子发射器件上进行附加处理之前,通过在过量的发射极材料层上形成保护层(58或70)来抑制发射极材料。在这些处理操作之后,去除覆盖电子发射元件的多余和保护层的材料,以暴露出电子发射元件。

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