Thin as in the stage itself which possesses

摘要

PPROBLEM TO BE SOLVED: To provide a suction stage that is capable of holding a thin strip work which is step-transferred by a certain region on a uniform plane at a prescribed position. PSOLUTION: A stage main body is formed with a recess, and a plate-like structure with a continuous airway is fitted into the recess of the stage main body so as to bring its undersurface into close contact with the bottom of the recess and not to make its top surface protrude from the recess. The suction opening of a suction pipe connected to a vacuum means is confronted by the undersurface center of the plate-like structure equipped with the continuous airway from below the stage main body. PCOPYRIGHT: (C)2004,JPO