Negative ion measurement apparatus of the negative ion measurement methods and in the plasma in the plasma

摘要

PROBLEM TO BE SOLVED: To enhance an accuracy and efficiency of measuring a negative ion in a plasma.;SOLUTION: The plasma 10 is irradiated with a sheet-like laser 2 of a sectional rectangular shape becoming thin by comparing a thickness direction with a widthwise direction. A probe 3 is inserted into a part irradiated with the sheet-like laser 2 in the plasma 10 from one surface F1 to the other surface F2 of a pair of surfaces opposed to the thickness direction (x-axis direction) of the sheet-like laser 2. Electrons optically released from negative ion in the plasma 10 by irradiating are collected by the probe 3, and a density of the negative ion is measured by measuring the collected optically released electron current.;COPYRIGHT: (C)2004,JPO