The substrate carrier system and the substrate conveying control unit, the sensing station which detects at least the position of one side of conveying means and roof conveying means on the floor which conveys

摘要

PROBLEM TO BE SOLVED: To prevent the collision of transfer by two carrier system in a process carrier system coexisting both of a floor carrier and a ceiling carrier. ;SOLUTION: This is a substrate carrier system having a floor carrier means 7, a ceiling carrier means 3, a detection part 23 for detecting the position of the floor carrier means 7, an interception part 17 which intercepts the transfer of the substrate 9 between manufacturing equipment 13 and the floor carrier means 7, and a control part 21 which inputs the results detected by the detection part 23 and controls the interception action of an interception part 17 based on the detection results.;COPYRIGHT: (C)2000,JPO