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The information processing terminal of semiconductor equipment and its production manner, and portable die, the head mount display, the navigation system, the portable telephone, the camera and projector
The information processing terminal of semiconductor equipment and its production manner, and portable die, the head mount display, the navigation system, the portable telephone, the camera and projector
An opening for separating elements is formed in self-alignment by making use of a pattern of electrodes. This eliminates the patterning margin which might otherwise be required for the element separation. Thus, the degree of integration of a thin film transistor circuit can be further raised.
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