The silicon carbide sintered body jig which is obtained by the production method and the aforementioned production method of the silicon carbide sintered body jig which is used for the one for semiconductor production

摘要

Production method of the silicon carbide sintered body jig which can assure the improvement of purity of the silicon carbide sintered body jig simply is offered. Production method of the silicon carbide sintered body jig which includes the process where under argon atmosphere, to the heat treatment temperature which is selected from the range of 2200 - the 2300C it heats sintered body 2, with programming rate 3 -, 5C/min 3 hours keeps in the aforementioned heat treatment temperature, to the 1000C descending/disembarking warm it can point with descending/disembarking warm speed 2 - 3C/min.