首页> 外国专利> Transfer method, the method of manufacturing a thin-film device, method of manufacturing the integrated circuit, and a method of manufacturing the circuit board, and a method of manufacturing the electro-optical device, electronic equipment and IC card

Transfer method, the method of manufacturing a thin-film device, method of manufacturing the integrated circuit, and a method of manufacturing the circuit board, and a method of manufacturing the electro-optical device, electronic equipment and IC card

机译:转印方法,薄膜装置的制造方法,集成电路的制造方法,电路基板的制造方法,电光装置,电子设备以及IC卡的制造方法

摘要

A process of forming a plurality of transfer objects on a transfer source substrate, applying energy to a partial area corresponding to the transfer target to be transferred, and transferring the transfer object corresponding to the partial area to a transfer destination substrate And a transfer method. The transfer target such as a plurality of elements and circuits arranged at intervals on the transfer destination base can be integrated and manufactured on the transfer source base, so the transfer target is formed directly on the transfer destination base Compared to the case where the transfer material is used, the amount of material used to manufacture the transferred object is relatively reduced, the area efficiency is greatly improved, and the transfer destination substrate on which many elements and circuits are arranged in a distributed manner is efficiently and inexpensively. Can be manufactured.
机译:在转移源基板上形成多个转移物体,将能量施加到与要转移的转移目标相对应的部分区域,以及将与该局部区域相对应的转移物体转移到转移目标基板的方法和转移方法。由于可以在传送源基座上集成并制造在传送目的地基座上间隔布置的诸如多个元件和电路之类的传送目标,因此与传送材料相比,直接在传送目的地基座上形成传送目标使用X射线摄影机,可以相对减少用于制造被转印物体的材料量,大大提高了面积效率,并且可以高效且廉价地分配其上分布有许多元件和电路的转印目标基板。可以制造。

著录项

  • 公开/公告号JPWO2003010825A1

    专利类型

  • 公开/公告日2004-11-18

    原文格式PDF

  • 申请/专利权人 セイコーエプソン株式会社;

    申请/专利号JP20030516104

  • 发明设计人 下田 達也;宇都宮 純夫;

    申请日2002-07-24

  • 分类号H01L27/12;G02F1/13;G02F1/1333;H01L21/336;H01L27/08;H01L29/786;H05B33/10;H05B33/14;

  • 国家 JP

  • 入库时间 2022-08-21 22:26:18

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号