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System and method for integrating a dispatching system with multiple process lines in a semiconductor manufacturing environment

机译:在半导体制造环境中将调度系统与多条生产线集成在一起的系统和方法

摘要

Provided are a system and method for automatically tracking a lot being moved between first and second manufacturing lines during semiconductor manufacturing. In one example, the method includes assigning a first state to the lot to indicate the lot's presence in the first manufacturing line. A trigger event indicating that the lot has been moved to the second manufacturing line may be identified, and a second state may be determined for the lot to reflect the lot's presence in the second manufacturing line. The second state may then be assigned to the lot.
机译:提供一种用于在半导体制造期间自动跟踪在第一生产线和第二生产线之间移动的批次的系统和方法。在一个示例中,该方法包括向该批次分配第一状态以指示该批次在第一生产线中的存在。可以识别指示该批次已经被移至第二生产线的触发事件,并且可以确定该批次的第二状态以反映该批次在第二生产线中的存在。然后可以将第二状态分配给该批次。

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