首页>
外国专利>
System and method for integrating a dispatching system with multiple process lines in a semiconductor manufacturing environment
System and method for integrating a dispatching system with multiple process lines in a semiconductor manufacturing environment
展开▼
机译:在半导体制造环境中将调度系统与多条生产线集成在一起的系统和方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
Provided are a system and method for automatically tracking a lot being moved between first and second manufacturing lines during semiconductor manufacturing. In one example, the method includes assigning a first state to the lot to indicate the lot's presence in the first manufacturing line. A trigger event indicating that the lot has been moved to the second manufacturing line may be identified, and a second state may be determined for the lot to reflect the lot's presence in the second manufacturing line. The second state may then be assigned to the lot.
展开▼