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Simulator of lithography tool, simulation method, and computer program product for simulator
Simulator of lithography tool, simulation method, and computer program product for simulator
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机译:光刻工具的仿真器,仿真方法以及用于仿真器的计算机程序产品
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摘要
A simulator of a lithography tool includes a correcting parameter memory storing a correcting scaling value to correct a focus error of a projection optical system in the lithography tool and a correcting bias to correct a critical dimension error gene rated in the lithography tool. A model simulation engine simulates an image formation under a corrected focus calculated by multiplying a defocus of the projection optical system by the correcting scaling value to model a calculated critical dimension of an image. A bias corrector adds the correcting bias to the calculated critical dimension to correct the image.
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