System and method for an increased bath lifetime in a single-use plating regime

摘要

A plating tool for a single-use plating process comprises a reclaim system in combination with a support tank to enable collection of non-consumed plating solution drained off from the process chamber, which is then re-circulated to the support tank after an efficient treatment in the reclaim system. Since the non-consumed plating solution is continuously recycled, the electrolyte may be preserved substantially without any time limit while at the same time production costs for a single-use plating process are significantly reduced.