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Surface acoustic wave device with lithium tantalate on a sapphire substrate and filter using the same
Surface acoustic wave device with lithium tantalate on a sapphire substrate and filter using the same
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机译：在蓝宝石衬底上具有钽酸锂的声表面波装置和使用该声表面波装置的滤波器
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摘要
A surface acoustic wave device includes a piezoelectric substrate having a first surface on which comb-like electrodes are formed, and a second surface, and a support substrate joined to the second surface of the piezoelectric substrate. The piezoelectric substrate is made of lithium, tantalate, and the support substrate is made of sapphire. The following expressions being satisfied:T/t⅓ (1)T/λ10 (2)where T is a thickness of the piezoelectric substrate, t is a thickness of the support substrate, and λ is a wavelength of a surface acoustic filter, propagated along the first surface of the piezoelectric substrate.
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机译：声表面波装置包括：压电基板，其第一表面形成有梳状电极;第二表面;以及支撑基板，其与压电基板的第二表面接合。压电基板由钽酸锂制成，并且支撑基板由蓝宝石制成。满足以下表达式：<？in-line-formulae description =“在线公式” end =“ lead”？> T / t / I> ⅓（ 1 ）<？in-line-formulae description =“ In-line Formulae” end =“ tail”？> <？in-line-formulae description =“ In-line Formulae” end =“ lead”？> T / λ> 10 （ 2 ）<？in-line-formulae description =“在线表达式” end =“ tail”？>其中，T是压电基板的厚度，t是支撑基板的厚度，λ是沿压电基板的第一表面传播的表面声波滤波器的波长。
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