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Micro-machined electromechanical system (MEMS) accelerometer device having arcuately shaped flexures
Micro-machined electromechanical system (MEMS) accelerometer device having arcuately shaped flexures
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机译:具有弓形弯曲部的微机械机电系统(MEMS)加速度计设备
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摘要
An apparatus and method for suspending a movable structure form a support structure wherein first and second flat and thin arcuately shaped flexures are formed having spaced apart substantially planar and parallel opposing surfaces, each of the first and second flexures being structured for connection between a support structure and a movable structure to be suspended from the support structure and being aligned along a common axis of rotation between the support structure and the movable structure.
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