Method and apparatus for bottleneck feed factor based scheduling

摘要

A method and system for scheduling lots for semiconductor manufacturing. The method and system comprising: determining a goal weighing factor (502); calculating the bottleneck feed factor for each lot in a tool queue (514); calculating the critical ratio for said each lot in a tool queue (516); calculating the relative rank of each lot in a tool queue; displaying the relative rank of each lot in a tool queue, for each tool queue; and selecting the lots in each tool queue for tooling according to said relative rank.