Optoelectronic component for contactless measurement of movements between a measurement object and the optoelectronic component

摘要

An optoelectronic component has a carrier body as well as an optoelectronic transmitter for emitting a coherent light beam and an optoelectronic receiver, which are applied on the carrier body. An optical device splits the light beam emitted by the optoelectronic transmitter into a reference beam and a measurement beam. The measurement beam reflected at the measurement object is received and superposed with the reference beam to form an interference beam. The interference beam is directed onto the optoelectronic receiver. The optoelectronic component furthermore contains a spacer, which is applied on the carrier body and on which the optical device is applied. The optical device is disposed parallel to and at a distance from the carrier body defined by the spacer.