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Method and system of dynamic learning through a regression-based library generation process
Method and system of dynamic learning through a regression-based library generation process
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机译:通过基于回归的库生成过程进行动态学习的方法和系统
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摘要
The present invention relates to a method and system for efficiently determining grating profiles using dynamic learning in a library generation process. The present invention also relates to a method and system for searching and matching trial grating profiles to determine shape, profile, and spectrum data information associated with an actual grating profile.
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