Time resolved emission spectral analysis system

摘要

A system for temporal and spectral resolved detection of photon emission from an integrated circuit is disclosed. A DUT is stimulated by a conventional ATE, so that its active devices emit light. The signal from the ATE is also sent to the system's computer as a synchronization signal. The light emitted from the switching devices is passed through a wavelength filter. Selected bands of wavelengths are then passed to respective detector(s) and the detector(s) response with respect to the time correlated ATE stimulus is studied.