首页>
外国专利>
Heterodyne interferometer with angstrom-level periodic nonlinearity
Heterodyne interferometer with angstrom-level periodic nonlinearity
展开▼
机译:具有埃级周期性非线性的外差干涉仪
展开▼
页面导航
摘要
著录项
相似文献
摘要
Displacement measuring interferometer systems and methods are disclosed. One or more acousto-optic modulators for receiving a laser light beam from a laser light source can be utilized to split the laser light beam into two or more laser light beams, while spatially separating frequencies thereof. One or more reflective mechanisms can be utilized to reflect one or more of the laser light beams back to the acousto-optic modulator. Interference of two or more of the laser light beams generally at the acousto-optic modulator can provide an interfered laser light beam thereof. A detector for receiving the interfered laser light beam can be utilized to provide interferometer measurement data.
展开▼