Multilayered optical thin-film filter, method of designing the same and filter module utilizing the same

摘要

In a multilayered optical thin-film filter having multiple quarter wavelength thick optical thin films with different refractive indices, the filter includes a plurality of unit cavities that are stacked multiple times via a connection layer, each unit cavity including a first reflector layer, a spacer layer in contact with the first reflector layer, and a second reflector layer in contact with the spacer layer. The first reflector layer is a layered body and the second reflector layer is a layered body. The spacer layer is a multilayered optical thin film with a high refractive index obtained by layering even number of films, or is composed of a multilayered optical thin film with a low refractive index. The connection layer is a multilayered optical thin film with a low refractive index obtained by layering odd number of films.