Method for ultrasonic cleaning using phased transducer arrays

摘要

A method for cleaning a substrate surface using ultrasonic energy includes an array of ‘N’ transducer elements. Electrical signals, S_n, having signal parameters including a voltage, V_N, and phase, θ_N, are provided to drive each transducer element and generate respective ultrasonic waves. A computer sub-system is used to control the signal parameters to establish a substantially uniform cavitation energy at a plurality of locations on the substrate surface. The signal parameters can be established to focus or steer the ultrasonic energy from the array to each location. To calculate the electrical signal parameters, the computer sub-system can use some or all of the following as inputs; the arrangement and inter-element spacing of the transducer elements, characteristics of the fluid medium, and the coordinates of the locations requiring cleaning.