Radio frequency Langmuir probe

摘要

A Langmuir probe for measuring characteristics of a plasma driven by radio frequency (RF) power comprises an elongated conductor (10) having an exposed tip (1) for insertion into an RF plasma and an outer end (3) for connection to external measuring circuitry. In order to reduce distortion over a range of RF frequencies, the probe includes an RF voltage divider (11), (12), (13), (14) in series between the tip and outer end of the conductor. Fig.)