METHOD FOR GENERATION OF PRECISION THICK-LAYER STRUCTURE PATTERNS AND EQUIPMENT FOR GENERATING PRECISION THICK-LAYER STRUCTURE PATTERNS

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  机译： 产生精密厚层结构图案的方法和产生精密厚层结构图案的设备

• 4. MULTILAYER MICROSTRUCTURES AND LASER BASED METHOD FOR PRECISION AND REDUCED DAMAGE PATTERNING OF SUCH STRUCTURES [P] . CA2381643C . 2010-08-03

  机译： 多层微结构和基于激光的此类结构精度降低方法

• 5. Multilayer microstructures and laser based method for precision and reduced damage patterning of such structures [P] . 美国专利： US2004149986A1 . 2004-08-05

  机译： 多层微结构和基于激光的方法，可用于此类结构的精密度和减少的损伤图案化

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