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THERMOELASTICALLY ACTUATED MICRORESONATOR

机译:热弹致动超声波发生器

摘要

A thermoelastically actuated microresonator device comprising: a main body (14) having a cantilevered beam (12); a heating element (20) located adjacent a surface of the cantilevered beam and adjacent the main body, that may be periodically actuated to generate a periodic heat gradient across a height of the beam, thereby facilitating periodic deflection of the beam.
机译:一种热弹性致动的微谐振器装置,包括:具有悬臂梁(12)的主体(14);和加热元件(20)位于悬臂梁的表面附近并且邻近主体,该加热元件(20)可以被周期性地致动以在梁的整个高度上产生周期性的热梯度,从而促进梁的周期性偏转。

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