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HIGH FREQUENCY CELL FOR PRODUCING A PLASMA JET FORMED BY MAGNETIC FIELDS, AND METHOD FOR IRRADIATING A SURFACE
HIGH FREQUENCY CELL FOR PRODUCING A PLASMA JET FORMED BY MAGNETIC FIELDS, AND METHOD FOR IRRADIATING A SURFACE
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机译:用于产生磁场形成的等离子体射流的高频电池以及辐射表面的方法
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摘要
The invention relates to a high frequency plasma jet source (23) comprising a plasma chamber (6) for a plasma, electrical means for igniting and obtaining a plasma, and an outlet comprising an extraction grid (5) for extracting a plasma jet (3) from the plasma chamber (6). According to the invention, a device is provided for producing a magnetic field (7, 8) by which means the plasma jet (3) can be diverged. The invention also relates to a vacuum chamber (22) comprising a housing (21), a surface (K) to be irradiated, and a high frequency plasma jet source (23) by which means a divergent plasma jet (3) can be produced. The invention further relates to a method for irradiating a surface by means of a high frequency plasma jet source (23), using a divergent plasma jet (3).
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