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A METHOD AND SYSTEM FOR CALIBRATING RESONATING PRESSURE SENSORS AND CALIBRATABLE RESONATING PRESSURE SENSORS
A METHOD AND SYSTEM FOR CALIBRATING RESONATING PRESSURE SENSORS AND CALIBRATABLE RESONATING PRESSURE SENSORS
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机译:用于校准谐振压力传感器和可校准谐振压力传感器的方法和系统
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摘要
A calibratable pressure sensor group having a working pressure range. The sensor group may include a first resonating pressure sensor having a single resonance frequency extremum point at a known flipping point pressure value within a working pressure range, and at least a second resonating pressure sensor having a single resonance frequency extremum point at another different flipping point pressure value within the working pressure range. Methods for calibrating the sensor groups may include measuring the resonance frequency of the first sensor at the known flipping point pressure values of the first sensor and second sensor, measuring the resonance frequency of the second sensor at the flipping point pressure value of the first sensor, measuring the resonance frequency of the first sensor at the flipping point pressure value of the second sensor and computing calibration curve parameters for one or more of the sensors in the sensor group. For a periodically varying pressure the measurements may be repeated for multiple cycles and averaged values may be used in the computations. Methods and systems are provided for calibrating sensors of the group.
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