METHOD FOR PRODUCING HIGH HEAT RESISTANT CONDUCTIVE THIN FILM, HIGH HEAT RESISTANT CONDUCTIVE THIN FILM PRODUCED BY THAT METHOD, MULTILAYER FILM, AND DEVICE HAVING MULTILAYER FILM

摘要

A high heat resistant conductive thin film satisfying high temperature stability, low temperature coefficient of resistance and mechanical characteristics entirely, especially, a high heat resistant conductive thin film causing no deterioration, rendering nonconductive, insufficient conductivity, cracking and/or stripping. More specifically, a high heat resistant conductive thin film comprising a thin film of at least one kind of platinum element, and thin film of at least one kind of high melting point metal element.