METHOD AND INSTRUMENT FOR MEASURING HIGH-FREQUENCY ELECTRIC CHARACTERISTIC OF ELECTRONIC COMPONENT, AND METHOD FOR CALIBRATING HIGH-FREQUENCY ELECTRICAL CHARACTERISTIC MEASURING INSTRUMENT

摘要

A plurality of signal conductors (12a, 12b) and a ground conductor (12c) are connected to respective measuring ports of a network analyzer (20). At least at three points of each signal conductor (12a, 12b) specified in the longitudinal direction, a short-circuit reference (10) is connected between the signal conductors (12a, 12b) and the ground conductor (12c) and electrical characteristics are measured. A through chip (13) is connected in series between the signal conductors (12a, 12b) and electrical characteristics are measured in order to calculate an error factor of the measuring system including the transmission line. An electronic component (17) to be measured is connected between the signal conductors or between the signal conductors and the ground conductor and electrical characteristics are measured. The error factor of the measuring system is removed from the measurements of the electronic component (17), thus determining the true values of the electrical characteristics of the electronic component (17). A high-precision high-frequency electrical characteristic measuring method insusceptible to variation in connection can thereby be realized.