METHOD FOR THE PRODUCTION OF A MONOLITHIC MULTILAYER ACTUATOR, MONOLITHIC MULTILAYER ACTUATOR MADE OF A PIEZOCERAMIC OR ELECTROSTRICTIVE MATERIAL, AND EXTERNAL ELECTRICAL CONTACT FOR A MONOLITHIC MULTILAYER ACTUATOR

摘要

The manufacturing method has a stacked device provided by a quasi mechanical series circuit formed from a number of piezoplates (2) by sintering green foils, with inner electrodes (3,4) incorporated in the plate stack fed to its opposing side surfaces for connection in parallel electrode groups via metallisation layers (5). Microfaults (8) are provided in the actuator joints along the stack longitudinal axis parallel to the inner electrodes and adjacent the opposing side surfaces, e.g. by preventing sintering of the green foils, for provision of internal stress points. An Independent claim for a monolithic multi-layer actuator is also included.