Integrated semiconductor chemical microreactor for real-time monitoring of biological reactions

摘要

An integrated semiconductor chemical microreactor (21) for real-time polymerase chain reaction (PCR) monitoring, has a monolithic body (2) of semiconductor material; a number of buried channels (3) formed in the monolithic body (2); an inlet trench (14) and an outlet trench (15) for each buried channel (3); and a monitoring trench (16) for each buried channel (3), extending between the inlet and outlet trenches (14, 15) thereof from the top surface (4) of the monolithic body (2) to the respective buried channel (3). Real-time PCR monitoring is carried out by channeling light beams into the buried channels (3), whereby the light beams impinge on the fluid therein, and by collecting and processing light beams coming out from the monitoring trenches (16) and emitted by the fluid within the buried channels (3).