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METHOD FOR FABRICATING OPTICAL WAVEGUIDE HAVING INTEGRATED REFLECTORS AND OPTICAL CONNECTION STRUCTURE USING THE SAME, PARTICULARLY CONCERNED WITH MAKING OPTICAL LOSS UNIFORM AND REALIZING EFFICIENT OPTICAL COUPLING
METHOD FOR FABRICATING OPTICAL WAVEGUIDE HAVING INTEGRATED REFLECTORS AND OPTICAL CONNECTION STRUCTURE USING THE SAME, PARTICULARLY CONCERNED WITH MAKING OPTICAL LOSS UNIFORM AND REALIZING EFFICIENT OPTICAL COUPLING
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机译:具有相同反射镜和光学连接结构的光学波导的制造方法,特别是要使光学损失均匀并实现有效的光学耦合
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摘要
PURPOSE: A method for fabricating an optical waveguide having integrated reflectors and an optical connection structure using the same are provided to change the direction of the light and reduce the optical loss by installing a micro mirror at an optical waveguide array. CONSTITUTION: A lower buffer layer(101) and a core layer are laminated on an upper surface of a flat substrate(100). A waveguide pattern(103) and a reflector pattern(104) for reflecting an optical signal are formed on an upper surface of the core layer. An upper buffer layer is formed on the core layer including the waveguide pattern and the reflector pattern. A predetermined pattern(106) is formed on a predetermined position of the substrate corresponding to a reflector.
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