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SEMICONDUCTOR DEVICE CAPABLE OF MEASURING SELF VIA AND VIA MEASURING APPARATUS AND METHOD THEREFORE TO SHORTEN INTERVAL OF TEST TIME
SEMICONDUCTOR DEVICE CAPABLE OF MEASURING SELF VIA AND VIA MEASURING APPARATUS AND METHOD THEREFORE TO SHORTEN INTERVAL OF TEST TIME
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机译:能够测量自我和通过测量装置的半导体装置和方法,从而缩短测试时间间隔
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摘要
PURPOSE: A semiconductor device capable of measuring a self via is provided to be advantageous to a signal transfer by directly connecting the output terminal of an internal voltage generating unit to a via pattern, and to shorten an interval of test time by determining whether a normal via pattern or an abnormal via pattern exists. CONSTITUTION: At least one test mode pad(110) is exposed to the outside through a protection layer. A mode set register(120) has an n-bit, connected to the test mode pad. The internal voltage generating unit decreases the voltage of applied Vdd(132) to output a voltage of several tens of milli volts, connected to the mode set register. At least one via pattern(140) forms a current path made by the voltage of several tens of milli volts, installed between the internal voltage generating unit and the test mode pad.
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