APPARATUS FOR MEASURING WABBLE OF A TURNTABLE AND A METHOD THEREOF, ESPECIALLY CONCERNED WITH MEASURING WABBLE BY COMBINING THE PRINCIPLE OF A COLLIMATOR WITH A SUPERPRECISION MIRROR

摘要

PURPOSE: An apparatus for measuring wabble of a turntable and a method thereof are provided to measure a degree of wabble of a turntable by installing a reflecting mirror on the top side of the turntable and displaying an image of detecting light reflected from the reflecting mirror, thereby reducing working hours and accurately measuring the wabble. CONSTITUTION: An optical irradiation part(3) is installed at an upper part of a main body(2), and has an optical irradiation module(31) irradiating measurement light and a camera(32) obtaining detecting light. A base(4) is placed at a lower part of the main body, wherein a plurality of inclination adjusting plates(41) are installed on a base. A jig(5) is installed on the base, and is secured to place a turntable(8) to be examined directly under the optical irradiation part. A driving module is installed at the jig for rotating the turntable to be examined. A super precision reflecting mirror(82) is secured on the top side of the turntable to be examined. A display unit(6) receives the detecting light from the camera for displaying the detecting light on a screen. A control box(7) controls driving of the optical irradiation part and the camera.