The method and system to measure the large scale using point diffraction based on the multilateration

摘要

Disclosed are a method and a system for measuring the surface profile of an object having a large-area. The present invention relates to a method and a system for measuring a profile of a surface by obtaining and analyzing interference patterns generated on an object, the patterns of which are formed by installing two-point light sources to the object to be measured. The measuring system includes an optical path changing unit for controlling an optical path of one of the two optical beam sources installed in the optical probe, and a number of (three or six) optical probes disposed according to applied measurement algorithms, thereby measuring the profile of the object.